Nanometer-scale ablation with a table-top soft x-ray laser.
نویسندگان
چکیده
Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
منابع مشابه
Table-top soft x-ray lasers
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ورودعنوان ژورنال:
- Optics letters
دوره 31 24 شماره
صفحات -
تاریخ انتشار 2006